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Germanium-doped Czochralski silicon: Oxygen precipitates and their annealing behavior

✍ Scribed by Jiahe Chen; Deren Yang; Hong Li; Xiangyang Ma; Duanlin Que

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 298 KB
Volume: 9
Category: Article
ISSN: 1369-8001
DOI: 10.1016/j.mssp.2006.08.009

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