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Generation of a highly uniform and dense plasma by distributing hollow cathodes on the electrode surface

✍ Scribed by M. Sugawara; T. Asami

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 431 KB
Volume: 73
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(94)02362-x

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