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Generation of 50-kHz large area induction thermal plasma for high rate, uniform processing

✍ Scribed by Sakuta, T.; Sakashita, N.; Yoshida, T.; Takashima, T.; Miyamoto, M.

Book ID
117863066
Publisher
IEEE
Year
1997
Tongue
English
Weight
146 KB
Volume
25
Category
Article
ISSN
0093-3813

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