✦ LIBER ✦
Generation kinetics of pyramidal hillock and crystallographic defect on Si(111) vicinal surfaces grown with SiH2Cl2
✍ Scribed by Motaharul K. Mazumder; Y. Mashiko; M.H. Koyama; Y. Takakuwa; N. Miyamoto
- Book ID
- 103173031
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 580 KB
- Volume
- 155
- Category
- Article
- ISSN
- 0022-0248
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