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Generation and accumulation of dislocations on the silicon surface under the action of pulse-periodic emission from a YAG: Nd laser

✍ Scribed by A. F. Banishev; V. S. Golubev; A. Yu. Kremnev


Book ID
110127761
Publisher
Springer
Year
2001
Tongue
English
Weight
226 KB
Volume
46
Category
Article
ISSN
1063-7842

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