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Generalized Keller-Simmons formula for nonisothermal plasma-assisted sputtering depositions

✍ Scribed by Palmero, A.; Rudolph, H.; Habraken, F. H. P. M.


Book ID
120418121
Publisher
American Institute of Physics
Year
2006
Tongue
English
Weight
318 KB
Volume
89
Category
Article
ISSN
0003-6951

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