General theoretical treatment of the angular dependence of critical depths in X-ray fluorescence spectroscopic studies of surfaces, thin films and multilayers
✍ Scribed by T. Scimeca; G. Andermann
- Publisher
- John Wiley and Sons
- Year
- 1990
- Tongue
- English
- Weight
- 751 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0142-2421
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✦ Synopsis
Abstract
A general theoretical treatment is offered to obtain the critical depth (d~c~) values of the characteristic K, L and M x‐ray fluorescence signals as a function of sample grazing incidence angle (θ~i~′), exit angle (θ~e~′) and atomic number Z. It is shown, for example, that for θ~e~′ = 1° and θ~i~′ = 89° in going from Z = 5 to Z = 74, d~c~ values range from 10^2^ to 10^4^ Å for K emission, from 30 to 500 Å for L emission, and from 10 to 50 Å for M emission provided 99% of the emerging radiation is accounted for. Detailed calculations are offered for cases when a smaller fraction of the outgoing radiation is considered. Critical depth calculations are also offered for single and multilayer thin films. The effect surface roughness has on the critical depth and the d~c~ dependence on energy are also examined. Finally, the depth resolution is calculated for a given angular definition.