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General description and theory of turbomolecular pump operation

✍ Scribed by E Rava; G Dentis; A Psacharopulo

Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
104 KB
Volume
40
Category
Article
ISSN
0042-207X

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torque on the tight contacts improved the contact resistances from values between 5 and I0 /~ to values between 1 and 2/zQ. 6 Tests with variable forces on the contacts were also carried out. The effect of the force was not reversible and the results for a particular force depended on whether the le