✦ LIBER ✦
Gel formation theory approach for the modelling of negative chemically amplified e-beam resists
✍ Scribed by G. Patsis; I. Raptis; N. Glezos; P. Argitis; M. Hatzakis; C.J. Aidinis; M. Gentili; R. Maggiora
- Publisher
- Elsevier Science
- Year
- 1997
- Tongue
- English
- Weight
- 272 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0167-9317
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