Ge nanoclusters in PECVD-deposited glass caused only by heat treatment

✍ Scribed by H. Ou; T.P. Rørdam; K. Rottwitt; F. Grumsen; A. Horsewell; R.W. Berg; P. Shi

• Book ID: 106027818
• Publisher: Springer
• Year: 2008
• Tongue: English
• Weight: 549 KB
• Volume: 91
• Category: Article
• ISSN: 0721-7269
• DOI: 10.1007/s00340-008-2942-5