Gaussian diffusion sphere model to predict deposition velocity onto wafers in laminar parallel airflow considering thermophoresis

✍ Scribed by Woo, Sang-Hee; Yook, Se-Jin; Han, Seog Young

• Book ID: 119885761
• Publisher: Springer-Verlag
• Year: 2012
• Tongue: English
• Weight: 805 KB
• Volume: 127
• Category: Article
• ISSN: 2190-5444
• DOI: 10.1140/epjp/i2012-12132-9