Gate oxide integrity on ITOX-SIMOX substrates and influence of test device geometry on characterization

✍ Scribed by Kawamura, K.; Deai, H.; Sakamoto, H.; Yano, T.; Hamaguchi, I.; Takayama, S.; Nagatake, Y.; Tachimori, M.; Matsumura, A.

• Book ID: 114538569
• Publisher: IEEE
• Year: 2001
• Tongue: English
• Weight: 232 KB
• Volume: 48
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/16.902732