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Gas‐Kinetic Temperature of Planar High‐Frequency Capacitive Discharge Plasma in N2/CO2/He Gas Mixtures

✍ Scribed by V. V. Azharonok; I. I. Filatova; V. D. Shimanovich; L. N. Orlov


Book ID
110320873
Publisher
Springer US
Year
2001
Tongue
English
Weight
83 KB
Volume
68
Category
Article
ISSN
0021-9037

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