Gas-sensing properties of chemically deposited SnOx films doped with Pt and Sb

✍ Scribed by V. Ambrazevičien≐; A. Galdikas; S. Grebinskij; A. Mironas; H. Tvardauskas

• Book ID: 103960725
• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 581 KB
• Volume: 17
• Category: Article
• ISSN: 0925-4005
• DOI: 10.1016/0925-4005(93)85180-i

✦ Synopsis

The intluence of Pt and Sb additives on the gas sensitivity of chemically deposited SnO, films has been investigated.

The temperature dependence of the resistance change and response time of SnO, to various gases in the air has been measured. Particular attention is paid to the CO and Ha sensitivities at an operating temperature t< 100 "C. The nondoped and Sb-doped SnOx films show a low gas sensitivity at t= 100 "C. The resistance change and response time r of P&doped films depend on the annealing temperature. The SnOa:Pt samples annealed at low temperature (t.400 "C) are gas sensitive but slow (T=SO-500 s) at 100 "C Annealing at t.2700 "C leads to a considerable reduction of the gas sensitivity of Pt-doped tilms. The SoOx samples doped simultaneously with Pt and Sb show a high sensitivity to CO or Hz and a fast response and recovery at talOO "C (~(2 s).