Gas phase reactions diagnosed by mass analysis in photo-assisted chemical vapor deposition of silicon nitride

Thermodynamics and kinetics of initial g

Thermodynamics and kinetics of initial gas phase reactions in chemical vapor deposition of titanium nitride. Theoretical study of TiCl4 ammonolysis

✍ Stanislav Ya. Umanskii; Konstantin P. Novoselov; Airat Kh. Minushev; Magdalena S 📂 Article 📅 2001 🏛 John Wiley and Sons 🌐 English ⚖ 204 KB

## Abstract Thermodynamic equilibrium and kinetics of the gas‐phase reaction between TiCl~4~ and NH~3~ have been studied computationally using results from recent quantum mechanical calculations of titanium tetrachloride ammonolysis.1 These calculations were based upon the transition state theory f