✦ LIBER ✦
Gas-phase parasitic reactions and Al incorporation efficiency in light radiation heating, low-pressure metal–organic chemical vapor deposition of AlGaN
✍ Scribed by Y.G Zhou; R Zhang; W.P Li; B Shen; P Chen; Z.Z Chen; S.L Gu; Y Shi; Y.D Zheng; Z.C Huang
- Book ID
- 117356069
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 90 KB
- Volume
- 45
- Category
- Article
- ISSN
- 0167-577X
No coin nor oath required. For personal study only.