✦ LIBER ✦
Gas doping of float zone silicon crystals in vacuum from a solid source using pressure differential to transport dopant
✍ Scribed by L.E. Katz; D.W. Hill
- Book ID
- 103164844
- Publisher
- Elsevier Science
- Year
- 1973
- Tongue
- English
- Weight
- 379 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0022-0248
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