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Gas diffusion barrier layers for transparent polymer packages for optical MEMS

✍ Scribed by M. Schmidt; S. Zinober; R. Müller-Fiedler; C. Müller; H. Reinecke


Book ID
108254952
Publisher
Elsevier
Year
2009
Weight
173 KB
Volume
1
Category
Article
ISSN
1876-6196

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