✦ LIBER ✦
Gas composition dependence of silicon nitride used as gallium diffusion barrier during GaAs molecular beam epitaxy growth on Si complementary metal oxide semiconductor
✍ Scribed by J. A. Walker; K. W. Goossen; J. E. Cunningham; W. Y. Jan
- Book ID
- 112811834
- Publisher
- Springer US
- Year
- 1994
- Tongue
- English
- Weight
- 366 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0361-5235
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