Gas analysis by electron probe

✍ Scribed by R.A. Lewis

• Book ID: 103915609
• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 528 KB
• Volume: 16
• Category: Article
• ISSN: 0739-6260
• DOI: 10.1016/0739-6260(85)90051-6

✦ Synopsis

Ahstract-Gas molecules may be examined by the X-ray dispersion equipment now often found as an accessory to the scanning electron microscope. Since the electron path is normally evacuated, special gas presentation techniques are required. Two techniques are described. In one, the gas fills the specimen chamber: in the other, the gas is heldbehind a thin window. Using these techniques, fourelements-F, Cl, Ar and I-have been detected in the gas phase. While this electron probe X-ray method is not suited to the analysis oflight moleculesand is not as sensitive as other familiar gas analysis methods, it serves to increase the versatility of the scanning electron microscope.