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Galvanoplated 3D structures for micro systems

✍ Scribed by B. Löchel; A. Maciossek; M. König; H.J. Quenzer; H.-L. Huber

Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
508 KB
Volume
23
Category
Article
ISSN
0167-9317

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