✦ LIBER ✦
Gallium arsenide surface chemistry and surface damage in a chlorine high density plasma etch process
✍ Scribed by C. R. Eddy; O. J. Glembocki; D. Leonhardt; V. A. Shamamian; R. T. Holm; B. D. Thoms; J. E. Butler; S. W. Pang
- Book ID
- 107457471
- Publisher
- Springer US
- Year
- 1997
- Tongue
- English
- Weight
- 189 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0361-5235
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