✦ LIBER ✦
Gallium arsenide etching using ion beams from hydrogen/methane mixtures
✍ Scribed by JM Villalvilla; C Santos; JA Vallés-Abarca
- Book ID
- 103473165
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 649 KB
- Volume
- 47
- Category
- Article
- ISSN
- 0042-207X
No coin nor oath required. For personal study only.