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GaAs surface plasma treatments for Schottky contacts

✍ Scribed by A. Paccagnella; A. Callegari


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
549 KB
Volume
34
Category
Article
ISSN
0038-1101

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## Abstract Thin layers of atmospheric‐pressure non‐equilibrium plasma can be generated by pulse surface corona discharges and surface barrier discharges developing on the treated surfaces or brought into a close contact with the treated surfaces. Plasma sources based on these discharge types have