Ga out-diffusion in rapid-thermal-processed GaAs with SiO2 encapsulants

✍ Scribed by Katayama, Masayuki; Tokuda, Yutaka; Inoue, Yajiro; Usami, Akira; Wada, Takao

• Book ID: 121506439
• Publisher: American Institute of Physics
• Year: 1991
• Tongue: English
• Weight: 742 KB
• Volume: 69
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.348496