✦ LIBER ✦
Future trends for interlayer dielectric films and their formation technologies in ULSI multilevel interconnections
✍ Scribed by Tetsuya Homma
- Book ID
- 113300525
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 762 KB
- Volume
- 41
- Category
- Article
- ISSN
- 0254-0584
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