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Future roadblocks and solutions in silicon technology as outlined by the ITRS roadmap

✍ Scribed by Wolfgang Arden

Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 271 KB
Volume: 5
Category: Article
ISSN: 1369-8001
DOI: 10.1016/s1369-8001(02)00131-2

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