Further improvements in end point detection using a wide angle ion beam souce: A B Dean et al, Vacuum, 38, 1988, 499–502

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 151 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90536-8