✦ LIBER ✦
Funnelling of rf current via a plasmoid through a grid hole in an rf capacitive plasma reactor
✍ Scribed by Chesaux, M; Howling, A A; Hollenstein, Ch
- Book ID
- 121497428
- Publisher
- Institute of Physics
- Year
- 2013
- Tongue
- English
- Weight
- 775 KB
- Volume
- 22
- Category
- Article
- ISSN
- 0963-0252
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