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Fundamental characteristics of liquid cluster ion source for surface modification

โœ Scribed by G.H. Takaoka; H. Noguchi; K. Nakayama; Y. Hironaka; M. Kawashita


Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
129 KB
Volume
237
Category
Article
ISSN
0168-583X

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