Functional localization in integrated circuits by signal selective voltage contrast in a scanning electron microscope

✍ Scribed by F. Marc; H. Frémont; P. Jounet; Y. Danto; M. Barré

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 524 KB
• Volume: 24
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(94)90082-5