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Fully three-dimensional microfabrication with a grayscale polymeric self-sacrificial structure

✍ Scribed by Xia, Chunguang; Fang, Nicholas

Book ID: 120559601
Publisher: Institute of Physics
Year: 2009
Tongue: English
Weight: 847 KB
Volume: 19
Category: Article
ISSN: 0960-1317
DOI: 10.1088/0960-1317/19/11/115029

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