Fully silicided NiSi and germanided NiGe dual gates on SiO2 n- and p-MOSFETs

✍ Scribed by D. Yu; C. Wu; C. Huang; A. Chin; W. Chen; Chunxiang Zhu; M. Li; Dim-lee Kwong

• Book ID: 126714652
• Publisher: IEEE
• Year: 2003
• Tongue: English
• Weight: 276 KB
• Volume: 24
• Category: Article
• ISSN: 0741-3106
• DOI: 10.1109/LED.2003.819274