From tribological coatings to low-k dielectrics for ULSI interconnects

✍ Scribed by A Grill

• Book ID: 117226591
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 241 KB
• Volume: 398-399
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/s0040-6090(01)01313-x