✦ LIBER ✦
From 120 to 32 nm CMOS technology: development of OPC and RET to rescue optical lithography
✍ Scribed by Yorick Trouiller
- Book ID
- 108109916
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 628 KB
- Volume
- 7
- Category
- Article
- ISSN
- 1631-0705
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