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Frequency dependence of ion bombardment of grounded surfaces in rf argon glow discharges in a planar system

✍ Scribed by Kohler, K.; Horne, D. E.; Coburn, J. W.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Plasma potentials of 13.56‐MHz rf argon

✍ Kohler, K.; Coburn, J. W.; Horne, D. E.; Kay, E.; Keller, J. H. 📂 Article 📅 1985 🏛 American Institute of Physics 🌐 English ⚖ 957 KB