Freeform lens arrays for off-axis illumination in an optical lithography system

✍ Scribed by Wu, Rengmao ;Li, Haifeng ;Zheng, Zhenrong ;Liu, Xu

• Book ID: 115356228
• Publisher: The Optical Society
• Year: 2011
• Tongue: English
• Weight: 717 KB
• Volume: 50
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.50.000725