Free volume and relaxation effects in polymer layers: application to the spin coating and bake processes

✍ Scribed by P. Paniez; M. Pons; O. Joubert

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 324 KB
• Volume: 11
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(90)90153-k