✦ LIBER ✦
Free-standing optical filters for a nanolithography source operating in the 12–15 nm wavelength range
✍ Scribed by V. P. Belik; Yu. M. Zadiranov; N. D. Il’inskaya; A. V. Korlyakov; V. V. Luchinin; M. A. Markosov; R. P. Seisyan; É. M. Sher
- Book ID
- 111449760
- Publisher
- SP MAIK Nauka/Interperiodica
- Year
- 2007
- Tongue
- English
- Weight
- 280 KB
- Volume
- 33
- Category
- Article
- ISSN
- 1063-7850
No coin nor oath required. For personal study only.