Free-standing epitaxial YBa2Cu3O7 microbolometers on silicon substrates

✍ Scribed by Roland Barth; Jörg Siewert; Bernd Spangenberg; Christian Jaekel; Heinrich Kurz; Werner Prusseit; Helmut Kinder

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 985 KB
• Volume: 34
• Category: Article
• ISSN: 0011-2275
• DOI: 10.1016/s0011-2275(05)80205-x

✦ Synopsis

Silicon micromachining technology is applied to fabricate free-standing YBCO microbolometers. High-quality YBCO films, grown by thermal co-evaporation on silicon substrates are processed by optical photolithography in combination with ion beam etching and selective plasma etching to fabricate free-standing 3 ~tm wide meander fines up to a length of 210 ~tm. The bolometric effect of these devices has been studied with chopped IR illumination at a wavelength of 1.3 lam. For a bolometer device, excellent speed performance is observed. The 10% to 90% rise and fall time, between the OFF and ON states is as low as 115 tas.