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Fracture and solid particle erosion of micro-crystalline, nano-crystalline and boron-doped diamond films

โœ Scribed by Wang, Xinchang; Zhang, Jianguo; Shen, Bin; Zhang, Tao; Sun, Fanghong

Book ID
121733888
Publisher
Elsevier Science
Year
2014
Tongue
English
Weight
897 KB
Volume
45
Category
Article
ISSN
0263-4368

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X-ray diffraction analysis and micro-Raman spectroscopy measurements have been used for stress studies on HFCVD 18 21 diamond films with different levels of boron doping. The boron incorporation in the film varied in the range 10 -10 3 boron / cm . The grain size, obtained from SEM images, showed gr