Fracture and fatigue behavior of single crystal silicon microelements and nanoscopic AFM damage evaluation

✍ Scribed by K. Komai; K. Minoshima; S. Inoue

• Book ID: 106186340
• Publisher: Springer-Verlag
• Year: 1998
• Tongue: English
• Weight: 463 KB
• Volume: 5
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s005420050137