✦ LIBER ✦
Fourier transform infrared spectroscopy study of molecular structure formation in thin films during hexamethyldisiloxane decomposition in low pressure rf discharge
✍ Scribed by Li, K; Gabriel, O; Meichsner, J
- Book ID
- 120395401
- Publisher
- Institute of Physics
- Year
- 2004
- Tongue
- English
- Weight
- 450 KB
- Volume
- 37
- Category
- Article
- ISSN
- 0022-3727
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