✦ LIBER ✦
Fourier transform infrared spectroscopy studies on thermal decomposition of tetrakis-dimethyl-amido zirconium for chemical vapor deposition of ZrN
✍ Scribed by Ihl-Woo Kim; Sung-Jae Kim; Do-Heyoung Kim; Heegweon Woo; Man-Yong Park; Shi-Woo Rhee
- Book ID
- 110652202
- Publisher
- Springer US
- Year
- 2004
- Tongue
- English
- Weight
- 375 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0256-1115
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