Fourier-based analysis of moiré fringe patterns of superposed gratings in alignment of nanolithography

✍ Scribed by Zhou, Shaolin; Fu, Yongqi; Tang, Xiaoping; Hu, Song; Chen, Wangfu; Yang, Yong

• Book ID: 115409254
• Publisher: Optical Society of America
• Year: 2008
• Tongue: English
• Weight: 513 KB
• Volume: 16
• Category: Article
• ISSN: 1094-4087
• DOI: 10.1364/OE.16.007869