✦ LIBER ✦
Four-mirror imaging system (magnification +1/5) for ArF excimer laser lithography
✍ Scribed by Cheon Seog Rim; Young Min Cho; Hong Jin Kong; Sang Soo Lee
- Book ID
- 104812238
- Publisher
- Springer
- Year
- 1995
- Tongue
- English
- Weight
- 283 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0306-8919
No coin nor oath required. For personal study only.