Four-beam laser interferometry for three-dimensional microscopic coordinate measurement

✍ Scribed by Nakamura, Osamu ;Goto, Mitsuo

• Book ID: 115343168
• Publisher: The Optical Society
• Year: 1994
• Tongue: English
• Weight: 757 KB
• Volume: 33
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.33.000031