Foundations of Ultra-Precision Mechanism Design (Developments in Nanotechnology, Vol 2)

✍ Scribed by Stuart T. Smith

• Publisher: CRC Press
• Year: 1994
• Tongue: English
• Leaves: 337
• Category: Library

✦ Synopsis

The realm of ultra precision mechanisms, for example in controlling motion to small fractions of a micrometer, is encroaching into many fields of technology. This book aims to provide a bridge for those moving from either an engineering or physics background towards the challenges offered by ultraprecision mechanisms. Using case study examples, this book provides a guide to basic techniques and gives technical, analytical and practical information.

✦ Table of Contents

BOOK COVER......Page 1
HALF-TITLE......Page 2
TITLE......Page 4
COPYRIGHT......Page 5
CONTENTS......Page 6
INTRODUCTION TO THE SERIES......Page 13
PREFACE......Page 15
1.1 The scale of ultraprecision......Page 18
1.2 Instrumentation terms......Page 22
1.3 Errors......Page 24
1.3.1 Random errors and noise......Page 25
1.3.2 Error combination......Page 29
References......Page 31
Introduction......Page 32
2.1 Statics, elasticity and beam distortion......Page 33
2.1.1 Elementary elasticity......Page 34
2.1.2 Bending of symmetrical beams......Page 36
2.2 Rigid body dynamics and Lagrange’s Equation......Page 39
2.3.1 Longitudinal vibration of a beam......Page 47
2.3.2 Transverse vibration of beams......Page 49
2.3.3 Rayleigh’s method......Page 50
References......Page 53
Introduction......Page 55
3.1.1 Coordinate systems......Page 56
3.1.2 Basic point constraints......Page 59
3.1.3 Point constraints and relative freedom......Page 63
3.1.4 Kinematic clamps......Page 66
3.2 Mobility and the kinematics of mechanisms......Page 67
3.2.1 Mechanism Mobility......Page 68
3.2.2 Kinematics of plane mechanisms......Page 69
3.3.1 Load bearing, area contact and elastic averaging......Page 71
3.3.2 Kinematic analogy to real systems......Page 74
3.4 Measurement and force loops......Page 77
3.5.1 ‘Cosine’ errors......Page 81
3.5.2 Abbe offset......Page 82
3.6 Nulling......Page 84
3.7 Compensation......Page 86
3.7.1 Mechanical compensation strategies......Page 87
3.7.2 Computer compensation of systematic errors......Page 91
3.8 Symmetry......Page 94
3.9 The effects of scaling: Stiffness and dynamic response......Page 95
3.10 Case study: A proposed nanohardness indentation instrument......Page 99
References......Page 103
4.1 A simple flexure design......Page 105
4.2 The pros and cons of flexure design......Page 108
4.2.2 The disadvantages of flexures......Page 109
4.3.1 Simple and compound leaf spring mechanisms......Page 110
4.3.2 Notch type spring mechanisms......Page 114
4.3.3 Kinematic analysis of linear spring mechanisms......Page 117
4.3.4 Additional considerations with compound spring designs......Page 123
4.4 Angular motion flexures......Page 125
4.5 Dynamic characteristics of flexure mechanisms......Page 128
4.6.1 X-ray interferometry......Page 131
4.6.2 The measurement of friction between a diamond stylus and specimen......Page 133
References......Page 135
Introduction......Page 137
5.1.1 Stationary and sliding contacts of a sphere and a flat......Page 138
5.1.2 Rolling contacts......Page 142
5.2 Linear drive couplings......Page 144
5.3 Rotary drive couplings......Page 148
5.3.1 Elastic rotary couplings......Page 149
5.3.2 Rolling rotary couplings (the knife edge)......Page 152
5.3.3 The sliding rotary coupling......Page 154
5.4 Case study: Irving Langmuir’s surface tension instrument for the determination of the molecular sizes of fatty acids......Page 156
References......Page 158
Introduction: Generalized leverage......Page 160
6.1 The effects of levers......Page 164
6.2.1 The pulley drive......Page 167
6.2.2 The wedge......Page 168
6.2.3 Angular gearboxes and friction drives......Page 170
6.2.4 Balanced torque actuation......Page 173
6.3 Linear levers......Page 174
6.4.1 The Marsh micro-tensile tester......Page 180
6.4.2 The Ångstrom ruler......Page 182
References......Page 183
Introduction......Page 185
7.1.1 Piezoelectric drives......Page 186
7.1.2 Electrostrictive......Page 191
7.1.3 Mechanical micrometers......Page 192
7.1.4 Friction drives......Page 193
7.1.6 Magnetoelasticity......Page 195
7.1.7 Shape memory alloys and bimetallic strips......Page 197
7.1.8 Electromagnetic......Page 198
7.1.9 Electrostatic......Page 202
7.1.10 Hydraulic......Page 203
7.2 Summary of actuator performance......Page 204
7.3.1 Inductive gauging......Page 207
7.3.2 Capacitive gauging......Page 209
7.3.3 Optical transducers......Page 211
7.3.4 Proximity probes for scanning tip microscopes......Page 212
7.3.6 Strain gauges......Page 215
References......Page 216
Introduction......Page 222
8.1 Design, materials and function......Page 223
8.2 Property groupings and charts......Page 225
8.3 Property profiles in precision engineering......Page 230
8.3.1 Mechanical property groups......Page 231
8.3.2 Thermal property groups......Page 232
8.3.3 Material profiles......Page 233
8.4.1 Metals......Page 236
8.4.2 Ceramics and glasses......Page 238
8.4.3 Polymers and composites......Page 241
8.4.4 Non-conventional materials for small devices......Page 243
8.5 Materials for transducers......Page 245
8.6.1 Simple flexure mechanism......Page 246
8.6.2 Talystep revisited......Page 248
References......Page 252
Introduction......Page 254
9.1 Sources of error in bearing slideways......Page 255
9.2 Fluid film bearings......Page 261
9.2.1 Air or oil hydrostatic bearings......Page 262
9.2.2 Hydrodynamic rotary bearings......Page 265
9.3.1 Frictional behaviour of graphite......Page 268
9.4 Dry or boundary lubrication......Page 269
9.4.1 Liquid film boundary lubrication......Page 270
9.4.2 Polymer bearings......Page 271
9.5 Case studies......Page 274
9.5.1 Nanosurf II......Page 275
9.5.2 Molecular measuring machine......Page 277
9.5.3 Super stiff grinding machine slides......Page 278
References......Page 279
10.1 The simple oscillator......Page 282
10.2.1 Standard forms of the equation of motion......Page 285
10.2.2 Response to a step change of force......Page 287
10.2.3 Steady state response to a harmonically varying input force......Page 289
10.2.4 Response to a harmonic displacement: Seismic isolation......Page 292
10.3 Harmonic response of series spring-mass-damper systems......Page 293
10.3.1 Response of two stage seismic isolator......Page 294
10.3.2 Multi-stage isolation......Page 297
10.4 Measurement of the viscous damping coefficient......Page 300
10.5 The design of resonant systems: Followers and......Page 301
10.5.1 Stylus tracking......Page 302
10.5.2 Vibration isolation......Page 303
10.5.3 Noise isolation......Page 306
10.6 Damping of small vibrations......Page 308
10.7 Case studies......Page 310
10.7.1 An atomic force probe......Page 311
10.7.2 A gravity wave antenna......Page 313
References......Page 314
Airy point mounting of datum bars......Page 316
AUTHOR INDEX......Page 318
SUBJECT INDEX......Page 324