Formulation for stable and efficient imp
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Moharam, M. G.; Grann, Eric B.; Pommet, Drew A.; Gaylord, T. K.
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Article
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1995
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Optical Society of America
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English
β 627 KB
The rigorous coupled-wave analysis technique for describing the diffraction of electromagnetic waves by periodic grating structures is reviewed. Formulations for a stable and efficient numerical implementation of the analysis technique are presented for one-dimensional binary gratings for both TE an