✦ LIBER ✦
Forming feedthroughs in laser-drilled holes in semiconductor wafers by double-sided sputtering : Thomas R. Anthony. IEEE Trans. Components Hybrids mfg Technol.CHMT-5 (1), 171 (1982)
- Book ID
- 103280509
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 134 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0026-2714
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